TEM Tomography of Pores with Application to Computational Nanoscale Flows in Nanoporous Silicon Nitride (NPN)

Versatile ultrathin nanoporous silicon nitride membranes.

Single- and multiple-nanopore membranes are both highly interesting for biosensing and separation processes, as well as their ability to mimic biological membranes. The density of pores, their shape, and their surface chemistry are the key factors that determine membrane transport and separation capabilities. Here, we report silicon nitride (SiN) membranes with fully controlled porosity, pore g...

Silicon Solar Cells with Nanoporous Silicon Layer

Pattern Photoresist Silicon Silicon Nitride Silicon Photoresist Silicon Nitride Silicon Etch Nitride Remove Photoresist

In this proposal we seek to establish a porous silicon based etching process in the WTC microfabrication laboratory. The new process will allow us to etch high aspect ratio holes through a wafer. Holes like these are important for decreasing the dead volume of connections between micro and macro systems and for increasing the complexity of micro-fluidic systems. At the present time, the minimum...

Application of Atom Probe Tomography to Nitride Semiconductors

A decade ago, atom probe tomography (APT) was applied almost exclusively to the study of metals, since the study of materials with lower conductivities, such as semiconductors, was considered pragmatically to be very difficult. The advent of commercially-available laser-pulsed APT systems has since enabled the increasingly widespread application of APT to semiconductors, with particularly notab...

Nanoporous In-MOF with multiple one-dimensional pores.

A topologically interesting nanoporous In-MOF, (Et(2)NH(2))[In(2,6-NDC)(2).2H(2)O.DEF], was prepared and its crystal structure and gas sorption properties were investigated with experiment and calculation.